The opinion in support of the decision being entered today was not written for
publication and is not binding precedent of the Board.
Paper No. 13
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte ANDREJ LITWIN and SHIH-HSIN YING
____________
Appeal No. 1998-2919
Application No. 08/405,063
____________
ON BRIEF
____________
Before JOHN D. SMITH, GARRIS and WARREN, Administrative Patent
Judges.
GARRIS, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on an appeal from the final rejection
of claims 15, 16 and 18 which are all of the claims pending in
the application.
The subject matter on appeal relates to a method of
forming an inhomogeneous doped film for low temperature reflow
comprising the steps of forming first and second BPSG layers
wherein the second layer has between around 1-4 wt. %
phosphorus and between around 7-8 wt. % boron, and reflowing
the first and second BPSG layers near 700° C. This appealed
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