Appeal No. 1999-0875 Application No. 08/467,353 results in unwanted compressive stresses in layer 10 surrounding the collar 41. Such stresses result in elastic deformation or strain outward from the trench. To avoid such stresses, a volume reduction is achieved in collar 41 or in material 51, or both. Significant volume reduction is achieved by increasing the amount of hydrogen in the as- deposited films 41 and 51, and later driving off most if not all of the hydrogen (dehydrogenation) during heat treatment. The Prior Art In Figures 2a and 2b, Nakata discloses a chip type tantalum capacitor which has an insulation resin frame 21 with a tantalum capacitor element 1 enclosed in the frame. The structure includes metal foil terminals 31 and 32, and lead wires 5a and 5b. Figs. 5 of Nakata illustrate a process of making the chip type capacitor. The capacitor element is placed in cavity 11 of resin housing 7. Kubo discloses a method of producing a titanium-aluminum alloy porous body for a solid electrolytic capacitor in order 4–Page: Previous 1 2 3 4 5 6 7 NextLast modified: November 3, 2007