Appeal No. 2000-0732
Application No. 08/741,799
The examiner relies on the following references:
Kuroi 5,578,507 Nov. 26, 1996
(filed May 11, 1995)
Kato 5,654,209 Aug. 05, 1997
Aronowitz et al. (Aronowitz) 5,654,210 Aug. 05, 1997
(filed May 4, 1995)
(filed Oct. 19, 1994)
Wolf, “Silicon Processing For The VLSI ERA” Lattice Press,
vol. 3, (1995), pp. 554-555.
Claims 1-4, 6, 8, 10, 11 and 14-16 stand rejected under
35 U.S.C. 102(e) as anticipated by Kato.
Claims 5, 7, 9, 12, 13, 19-29 and 44-53 stand rejected
under 35 U.S.C. 103. As evidence of obviousness, the examiner
cites Kato and Wolf with regard to claims 5 and 7, Kato and
Aronowitz with regard to claim 12, Kato and Kuroi with regard
to claims 9, 13, 19-23, 26-29, 44-46 and 50-53, and Kato,
Kuroi and Wolf with regard to claims 24, 25 and 47-49.
Reference is made to the briefs and answer for the
respective positions of appellants and the examiner.
OPINION
At the outset, we note that, in accordance with
3–
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