Appeal No. 2000-1713
Application 09/025,551
the workpiece holding face 22 of chuck 40 which is deformed by
the operation of the surface straightening portion 42, thereby
straightening the reference plane.
On page 43 of the specification, beginning at line 13,
appellants disclose that in the grinding/polishing process of
workpiece 10, even when any force is applied to the surface of
the workpiece 10, the elastic deformation amount of the
workpiece due to such force is very small. That is, the
elastic deformation amount of the workpiece due to the force
which is applied to the surface of the workpiece from the
grinding/polishing process is extremely smaller than the
deformation amount of the workpiece due to the control of the
reference plane of the workpiece.
Thus, appellants’ disclosure indicates that there is a
distinction between deformation due to the control of the
reference plane of the workpiece versus elastic deformation
due to the force from the grinding/polishing process.
In view of the disclosure as set forth in the
specification as discussed above, it therefore is clear that
the phrase "by deforming" a workpiece or composite means
deformation due to the control of the reference plane of the
workpiece caused by forces from the workpiece holding face 22
of chuck 40 which is deformed by the operation of surface
straightening portion 42, and that therefore the phrase does
not mean elastic deformation due to the force applied at the
surface of the workpiece during grinding/polishing processing.
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Last modified: November 3, 2007