Appeal No. 2001-0006
Application 08/993,107
providing a baseline image of said reticle which baseline
image was created while the reticle was qualified as being of
acceptable quality;
generating a current image of the reticle; and
comparing the baseline and current images wherein the
differences between these images identify defects that may have
arisen in the time between when the baseline image was created
and when the current image is generated.
The following references are relied on by the examiner:
Micka 3,909,602 Sep. 30, 1975
Stonestrom et al.
(Stonestrom) 4,898,471 Feb. 6, 1990
Noguchi et al. (Noguchi) 5,098,191 Mar. 24, 1992
Claims 1-26 stand rejected under 35 U.S.C. § 103. As
evidence of obviousness, the examiner relies upon Micka in view
of Noguchi, further in view of Stonestrom.
Rather than repeat the positions of the appellants and the
examiner, reference is made to the brief and reply brief for
appellants' positions and to the final rejection and answer for
the examiner's positions.
OPINION
We reverse.
The examiner relies upon the statement of the rejection of
the claims on appeal at pages 2-4 of the final rejection. There,
the examiner merely makes general references to each of the three
2
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