Appeal No. 1998-1681 Page 4
Application No. 08/523,075
Lewis et al. (Lewis) 4,824,769 Apr. 25,
1989
Suzuki et al. (Suzuki) 4,900,938 Feb. 13,
1990
Muller et al. (Muller) 5,252,881 Oct. 12,
1993
Nakai et al. (Nakai), Japan Pat. Pub. No. 64-073242, published
Mar. 17, 19891
Miura, Japan Pat. Pub. No. 04-147641, published May. 21, 19922
Elliott, Integrated Circuit Fabrication Technology, McGraw-
Hill (1982), pp. 6-9, 166-171, 210-213, 233-243, 282, 283 and
302-305.
Claims 26-33 and 35 stand rejected under 35 U.S.C. § 103
as being unpatentable over Elliott in view of Miura, Nakai and
Lewis. Claims 26-35 stand rejected under 35 U.S.C. § 103 as
being unpatentable over Elliott in view of Miura, Nakai, Lewis
and Muller. Claims 20-25 stand rejected under 35 U.S.C. § 103
as being unpatentable over Miura in view of Suzuki and
Elliott.
We refer to the briefs and the answer for a complete
exposition of the opposing viewpoints expressed by appellant
and the examiner.
1All references to Nakai in this decision are to the
English language translation thereof, of record.
2All references to Miura in this decision are to the
English language translation thereof, of record.
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