The opinion in support of the decision being entered today was
not written for publication and is not binding precedent of the
Board.
Paper No. 23
UNITED STATES PATENT AND TRADEMARK OFFICE
__________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
__________
Ex parte ZHENG XU, FUSEN CHEN, and JAIM NULMAN
__________
Appeal No. 1999-2202
Application No. 08/733,620
__________
ON BRIEF
__________
Before GARRIS, WARREN, and TIMM, Administrative Patent Judges.
GARRIS, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on an appeal that involves claims 1-21
which are all of the claims in the application.
The subject matter on appeal relates to a method and
apparatus for sputter depositing a target material on a workpiece
via a plasma generated by a coil wherein an arrangement of
magnetic fields originating externally of the coil reduce sputter
1
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