Ex Parte XU et al - Page 1



          The opinion in support of the decision being entered today was              
          not written for publication and is not binding precedent of the             
          Board.                                                                      
                                                            Paper No. 23              
                      UNITED STATES PATENT AND TRADEMARK OFFICE                       
                                     __________                                       
                         BEFORE THE BOARD OF PATENT APPEALS                           
                                  AND INTERFERENCES                                   
                                     __________                                       
                   Ex parte ZHENG XU, FUSEN CHEN, and JAIM NULMAN                     
                                     __________                                       
                                Appeal No. 1999-2202                                  
                             Application No. 08/733,620                               
                                     __________                                       
                                      ON BRIEF                                        
                                     __________                                       
          Before GARRIS, WARREN, and TIMM, Administrative Patent Judges.              
          GARRIS, Administrative Patent Judge.                                        
                                 DECISION ON APPEAL                                   
               This is a decision on an appeal that involves claims 1-21              
          which are all of the claims in the application.                             
               The subject matter on appeal relates to a method and                   
          apparatus for sputter depositing a target material on a workpiece           
          via a plasma generated by a coil wherein an arrangement of                  
          magnetic fields originating externally of the coil reduce sputter           

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