The opinion in support of the decision being entered today was not
written for publication and is not binding precedent of the Board.
Paper No. 37
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte TOHRU OGAWA
____________
Appeal No.2000-1112
Application No. 08/518,363
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ON BRIEF
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Before BARRETT, DIXON, and GROSS, Administrative Patent Judges.
GROSS, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on appeal from the examiner's final
rejection of claims 1, 59, 62 through 64, and 68. Claims 2
through 58 have been canceled. Claims 60, 61, 66, 67, and 69
through 71 have been allowed. 1
Appellant's invention relates to a method and apparatus for
forming a pattern on a substrate, the method including the use of
a phase shifting mask. Claim 1 is illustrative of the claimed
invention, and it reads as follows:
1 We note that although claim 65 was neither canceled nor
indicated as allowable, it has not been rejected and, therefore,
is not before us on appeal.
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