Ex Parte HWANG et al - Page 1




                                  The opinion in support of the decision being entered today was not written                     
                                         for publication and is not binding precedent of the Board.                              

                                                                                                       Paper No. 20              

                                   UNITED STATES PATENT AND TRADEMARK OFFICE                                                     
                                                          ____________                                                           
                                        BEFORE THE BOARD OF PATENT APPEALS                                                       
                                                    AND INTERFERENCES                                                            
                                                          ____________                                                           
                                       Ex parte MING JANG HWANG, KEIZO HOSODA,                                                   
                          SHINTARO AOYAMA, TADASHI TERASAKI and TSUYOSHI TAMARU                                                  
                                                          ____________                                                           
                                                      Appeal No. 2002-1178                                                       
                                                   Application No. 09/354,459                                                    
                                                          ____________                                                           
                                                            ON BRIEF                                                             
                                                          ____________                                                           
               Before HAIRSTON, GROSS, and BARRY, Administrative Patent Judges.                                                  
               HAIRSTON, Administrative Patent Judge.                                                                            



                                                    DECISION ON APPEAL                                                           
                      This is an appeal of claims 1 through 4, 6 through 8 and 21 through 28.                                    
                      The disclosed invention relates to a method of reducing by-product deposition inside a wafer               
               processing chamber by introducing a heated gas into the chamber concurrently with the introduction                
               of reactant gases into the chamber to maintain the inner wall of the chamber at a temperature                     
               sufficiently high to maintain a reaction product formed by the reactant gases in a gaseous phase of               
               the sublimation curve for the reaction product when contacting the inner wall.                                    






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