Ex Parte HWANG et al - Page 5




               Appeal No. 2002-1178                                                                                                
               Application No. 09/354,459                                                                                          


               heated gas teachings of Nozaki, the examiner tacitly admits (answer, pages 8 and 9) that the control                
               gas 8 in Mikoshiba is not a heated gas.  Although Nozaki introduces a heated carrier gas into the                   
               chamber 7 via supply port 23, Nozaki, like Mikoshiba, uses the heated gas to prevent the reaction                   
               gas from coming into contact with the side walls of the chamber (translation, page 5).  Even if the                 
               reactant gases in Mikoshiba and Nozaki are maintained on the gaseous sides of their respective                      
               sublimation curves, as argued by the examiner (answer, pages 9 and 10), neither Mikoshiba nor                       
               Nozaki teaches or would have suggested to the skilled artisan maintaining “said reaction product in                 
               the gaseous phase of said sublimation curve when contacting the peripheral inner wall.”  Thus, the                  
               obviousness rejection of claims 1 through 3, 6 through 8, 21 through 23 and 25 through 28 is                        
               reversed.                                                                                                           
                       In the alternative rejection of claims 1 through 3, 6 through 8, 21 through 23 and 25 through               
               28, Ohashi, like Mikoshiba and Nozaki, does not want the reactant gas to contact the inner wall of                  
               the chamber (column 12, lines 65 through 67; column 15, lines 35 through 38).  The examiner                         
               acknowledges (answer, page 12) that Ohashi does not disclose the claimed heated gas.  Thus, the                     
               obviousness rejection of claims 1 through 3, 6 through 8, 21 through 23 and 25 through 28 is                        
               reversed because the reactant gases in the references do not contact the “peripheral inner wall” of                 
               either chamber.                                                                                                     
                       The obviousness rejections of claims 4 and 24 are reversed because neither the admitted                     
               prior art nor the teachings of Pierson cure the noted shortcomings in the teachings of Mikoshiba,                   
               Nozaki and Ohashi.                                                                                                  
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