Appeal No. 2002-2159 Page 2
Application No. 09/652,969
BACKGROUND
The appellant's invention relates to a chemical dispensing system for
semiconductor wafer processing. An understanding of the invention can be derived
from a reading of exemplary claim 38, which has been reproduced below.
The prior art references of record relied upon by the examiner in rejecting the
appealed claims are:
Iwata et al. (Iwata) 4,611,553 Sep. 16, 1986
Milina 5,444,921 Aug. 29, 1995
The examiner has rejected claims 38-40 under 35 U.S.C. § 103 as being
unpatentable over Iwata in view of Milina.
Rather than reiterate the conflicting viewpoints advanced by the examiner and
the appellant regarding the above-noted rejection, we make reference to the Answer
(Paper No. 12) for the examiner's complete reasoning in support of the rejection, and to
the Brief (Paper No. 11) and Reply Brief (Paper No. 13) for the appellant's arguments
thereagainst.
OPINION
In reaching our decision in this appeal, we have given careful consideration to
the appellant's specification and claims, to the applied prior art references, and to the
respective positions articulated by the appellant and the examiner. As a consequence
of our review, we make the determinations which follow.
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