Appeal No. 2003-0931
Application 09/383,508
1. A reticle sorter coupled between a reticle storing system
and one or more photolithography exposure tools, comprising:
one or more bays adapted for holding a cassette having slots
for reticles;
a sorting system adapted for retrieving the reticles from
and inserting the reticles into the slots in order to sort the
reticles within the cassette; and
an inspection system, coupled between the one or more bays
and an input port of the reticle sorter, for inspecting a
characteristic of each reticle.
10. The reticle sorter of claim 1, wherein the sorting
system includes two or more docking locations.
19. A reticle sorter coupled between a reticle storing
system and one or more photolithography exposure tools,
comprising:
one or more bays adapted for holding a plurality of
cassettes having slots for reticles; and
a sorting arrangement adapted for retrieving the reticles
from and inserting the reticles into the slots so as to sort the
reticles between cassettes.
THE REJECTION
Claims 1 through 4, 6 through 12 and 19 stand rejected under
35 U.S.C. § 112, second paragraph, as failing to particularly
point out and distinctly claim the subject matter the appellants
regard as the invention.
Attention is directed to the appellants’ brief (Paper No.
20) and to the examiner’s final rejection and answer (Paper Nos.
2
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