0
which the object table is displaceable over a guide parallel to at least an X-direction,
which guide is fastened to a first frame of the positioning device while a stationary part of
the drive unit is fastened to a second frame of the positioning device which is
dynamically isolated from the first frame, wherein the first frame of the positioning
device of the substrate holder belongs to the machine frame of the lithographic device,
while the second frame of the positioning device of the substrate holder belongs to a force
frame of the lithographic device which is dynamically isolated from the machine frame;
and wherein a reaction force exerted by the object table on the drive unit during operation
and arising from a driving force exerted by the drive unit on the object table is
transmittable exclusively into the second frame.
10. The claims of the parties are:
Van Engelen: 1-22
Lee: 1-6
11. The claims of the parties which correspond to Count I are:
Van Engelen: 1-3 and 10-12
Lee: 1-6
12. The claims of the parties which do not correspond to Count I are:
Van Engelen: 4-9 and 13-22
Lee: none
9. The level of ordinary skill in the art is defined by the prior art references made of
record.
C. Decision
Van Engelen preliminM motions 1 and 2
Van Engelen preliminary motions 1 and 2 are for judgment against Lee on the basis that
Lee's claims 4-6 are unpatentable under 35 U.S.C. § 112, T 1, or are indefinite under 35 U.S.C.
§ 112, 12, or that there is no interference-in-fact. As the movant van Engelen bears the burden
to demonstrate that it is entitled to the relief sought. 37 CFR § 1.637(a).
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