Appeal No. 2003-1366
Application No. 09/488,075 Page 2
BACKGROUND
Appellants' invention relates to a method for treating a
silanol-containing silica film located on a substrate with an
oligomer or polymer reactive with the silanols of the film to
form a hydrophobic coating on the film. According to appellants
(specification, page 4), their inventive surface modification
method results in a treated film with enhanced mechanical
strength while achieving desirable dielectric values. Also, see
page 34, Table 7 and numbered lines 9-13 of the specification. A
further understanding of the invention can be derived from a
reading of exemplary claim 1, which is reproduced below.
1. A process for treating a silica film on a
substrate, which comprises reacting a suitable silica
film with a composition comprising a surface
modification agent, wherein said silica film is present
on a substrate and wherein said reaction is conducted
under conditions and for a period of time sufficient
for said surface modification agent to form a
hydrophobic coating on said film and said surface
modification agent comprises at least one type of
oligomer or polymer reactive with silanols on said
silica film.
The prior art references of record relied upon by the
examiner in rejecting the appealed claims are:
Shimizu et al. (Shimizu) 5,013,585 May 07, 1991
Gnade et al. (Gnade) 5,470,802 Nov. 28, 1995
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