The opinion in support of the decision being entered today was not
written for publication and is not binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte BIN YU, ROBERT B. OGLE, ERIC N. PATON,
CYRUS E. TABERY, and QI XIANG
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Appeal No. 2004-1853
Application No. 09/983,625
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ON BRIEF
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Before PAK, OWENS, and KRATZ, Administrative Patent Judges.
KRATZ, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on appeal from the examiner's final
rejection of claims 1-11, which are all of the claims pending in
this application.
BACKGROUND
Appellants' invention relates to a method of manufacturing a
semiconductor device wherein source/drain regions in the
substrate are activated by laser thermal annealing. Thereafter,
a nickel silicide layer is disposed on the activated source/drain
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