The opinion in support of the decision being entered
today was not written for publication in a law journal
and is not binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
Ex parte WILLIAM S. BRENNAN
Appeal No. 2005-0277
Application No. 09/883,883
ON BRIEF
Before KIMLIN, WARREN and TIMM, Administrative Patent Judges.
KIMLIN, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal from the final rejection of claims 1-15.
Claims 16-36 were withdrawn from consideration. Claims 1 and 10
are illustrative:
1. A process for use in fabricating an integrated circuit,
comprising:
performing an operation on a wafer using a fabrication tool;
generating desorbed volatiles from the wafer after
performing the operation;
-1-
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