Appeal No. 2005-0998
Application No. 10/054,605
Appellants urge that the mere fact that annealing might be
suitable for one type of material does not suggest it would be
beneficial for a different material. We find this argument
unpersuasive here since, in our opinion, Zhao appears to suggest
that annealing would be beneficial for a variety of barrier layer
materials. In this regard, we note that Zhao (col. 8, ll. 8-21)
discloses that the barrier layer can be formed from “a variety of
metals or metal alloys which have a barrier property to prevent
copper diffusion.” Further, Zhao places no limitation on the
types of material for which annealing would be beneficial. Thus,
it may be reasonably inferred from the Zhao disclosure that
annealing is generally applicable and desirable. Appellants have
not adduced any credible evidence to refute this inference.
Accordingly, the inference stands unrebutted.
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