The opinion in support of the decision being entered today was
not written for publication and is not precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
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Ex parte YING-ZHONG SU and WEN-CHI WANG
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Appeal No. 2005-1711
Application No. 10/217,370
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ON BRIEF
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Before KRATZ, JEFFREY T. SMITH, and PAWLIKOWSKI, Administrative
Patent Judges.
PAWLIKOWSKI, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on appeal under 35 U.S.C. § 134 from the
examiner’s final rejection of claims 1-20.
A copy of claims 1, 9, 17, and 20 are set forth below:
1. A gas distribution plate assembly for a
process chamber, comprising:
a gas distribution plate;
a plurality of central openings extending through
a central area of said plate;
a plurality of peripheral openings extending
through a peripheral area of said plate, each of said
peripheral openings having a diameter larger than a
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Last modified: November 3, 2007