Appeal No. 2005-1711
Application No. 10/217,370
diameter of said central openings, respectively, and
said peripheral openings being variable in diameter;
and
a plurality of middle openings extending through
a middle area of said plate between said central area
and said peripheral area, each of said middle openings
having a diameter between said diameter of said
central openings and said diameter of said peripheral
openings.
9. A gas distribution plate assembly for a
process chamber, comprising:
a gas distribution plate;
a plurality of central openings extending through
a central area of said plate;
a plurality of peripheral openings extending
through a peripheral area of said plate, each of said
peripheral openings having a diameter larger than a
diameter of said central openings, respectively;
a plurality of middle openings extending through
a middle area of said plate between said central area
and said peripheral area, each of said middle openings
having a diameter between said diameter of said
central openings and said diameter of said peripheral
openings;
first and second peripheral regions located at
diametrically-opposed positions to each other on said
plate and third and fourth peripheral regions located
at diametrically-opposed positions to each other on
said plate;
wherein said plurality of peripheral openings
comprises first and second groups of peripheral
openings extending through said plate in said first
and second peripheral regions, respectively, and third
and fourth groups of peripheral openings extending
through said plate in said third and fourth peripheral
regions, respectively; and
wherein said first and second groups of
peripheral openings each comprises openings having a
first diameter; and wherein said third and fourth
groups of peripheral comprises openings each comprises
having a second diameter greater than said first
diameter.
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