Appeal 2005-2100
Application 09/826,038
back technique). Funk teaches the advantages of using a feed forward technique and
both kinds of etching techniques (no specific order required). It would therefore have
been obvious to have utilized a feed forward technique when conducting a dry etching
step followed by a wet etching step in view of the aforementioned teachings, to
achieve the advantages taught in Funk of using a feed forward technique.
In view of the above, we affirm the 35 U.S.C § 103(a) rejection of claim 6.
II. Conclusion
The 35 U.S.C. § 103 rejection of claim 6 as being obvious over Funk is affirmed.
No time period for taking any subsequent action in connection with this appeal
may be extended under 37 CFR § 1.136(a).
AFFIRMED
rebut a prima facie case.
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