The opinion in support of the decision being entered today was not written
for publication and is not binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
___
Ex parte GUY BLALOCK and KEVIN G. DONOHOE
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Appeal No. 2006-0216
Application No. 10/325,203
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ON BRIEF
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Before GARRIS, KRATZ and FRANKLIN, Administrative Patent Judges.
GARRIS, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on an appeal which involves claims 22-44.
The subject matter on appeal relates to a method of operating a plasma chamber
which comprises engergizing a coil with a waveform having a voltage profile that is a
function of the length of the coil and varying the voltage profile to achieve a maximum
coupling (i.e., with a gas in the chamber) at a desired point. The step of
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