The opinion in support of the decision being entered today was not written for publication and is not binding precedent of the Board. UNITED STATES PATENT AND TRADEMARK OFFICE ____________ BEFORE THE BOARD OF PATENT APPEALS AND INTERFERENCES ____________ Ex parte JU-HYUNG LEE, TROY KIM, SOOVO SEN, JUAN CARLOS ROCHA-ALVAREZ, LUN TSUEL, ANNAMALAI LAKSHMANAM, MAOSHENG ZHAO, INNA SHMURUN, and SHANKAR VENKATARAMAN ____________ Appeal No. 2006-1871 Application No. 10/245,442 ____________ ON BRIEF ____________ Before KIMLIN, KRATZ and GAUDETTE, Administrative Patent Judges. KRATZ, Administrative Patent Judge. DECISION ON APPEAL This is a decision on appeal from the examiner's final rejection of claims 13, 15, 21, 23, 29, and 31, which are all of the claims pending in this application. We have jurisdiction pursuant to 35 U.S.C. § 134. BACKGROUND Appellants' invention relates to a method for cleaning a chemical vapor deposition chamber. An understanding of the invention can be derived from a reading of exemplary claim 29, which is reproduced below.Page: 1 2 3 4 5 6 7 8 9 10 11 12 13 NextLast modified: November 3, 2007