The opinion in support of the decision being entered today
is not binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
________________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
________________
Ex parte HARUHIRO HARRY GOTO,
WILLIAM R. HARSHBARGER, and KAM S. LAW
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Appeal 2007-1884
Application 10/329,205
Technology Center 1700
________________
Decided: June 13, 2007
________________
Before EDWARD C. KIMLIN, CHUNG K. PAK, and
CHARLES F. WARREN, Administrative Patent Judges.
KIMLIN, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal from the final rejection of claims 8 and 10-12.
Claim 8 is illustrative:
8. A process for selectively etching silicon from a workpiece without
etching silicon oxide or silicon nitride, comprising the simultaneous steps of:
holding a workpiece comprising silicon on a susceptor within a
chamber interior;
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