Appeal No. 95-3017
Application 07/952,061
cally recited as a region 22 such as in Figure 2 comprising a
pattern of subresolution features. The pattern is made up in
the exemplary Figure 2 of subregions 22a and 22b. To the extent
claimed, it is clear to us from the above referenced portions of
columns 3 to 5 of Pease as relied upon by the examiner that it
is the disclosed trenches 118 in representative Figure 1 of this
reference which correspond to the claimed pattern of features
that are below the resolution of the printer set forth in claim
1 on appeal. This pattern is set forth in the generic/master
mask 11 at the bottom of Figure 2. This region is also pertinent
to the subject matter of dependent claim 2 on appeal.
Although it is clearly the intent of Pease in the above
noted referenced portions of this reference not to image the
trenches on the underlying die, it is revealed at column 5,
lines 27 to 31 that some light, “a small amount of light” may
be projected on the region of the die corresponding to the
positions of the trenches. This teaching clearly indicates
to the artisan that there is some attenuation of the light
corresponding to the trench location in such a manner as to
correspond to the reduced portion of radiation incidence upon
the die to the extent recited in claim 1 on appeal. As such,
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