Appeal No. 95-2728
Application 07/735,668
The subject matter on appeal relates to a plasma etching
method and apparatus. This appealed subject matter is
adequately illustrated by independent method claims 21 and 48
and by independent apparatus claim 29. A copy of these claims
taken from the appellants' brief is appended to this decision.
The references of record relied upon by the examiner to
support the final rejection are:
Suzuki et al. (Suzuki) 4,579,623 Apr. 1,
1986
Kawasaki et al. (Kawasaki) 4,795,529 Jan. 3,
1989
Arikado et al. (Arikado) 4,878,995 Nov.
7, 1989
Japanese Kokai Application 158627/85 Aug. 20,
1985
(Tazi)
Claim 48 is rejected under 35 U.S.C. § 102(e) as being
anticipated by Kawasaki.
Claims 21 through 35, 45 and 46 are rejected under 35
U.S.C. § 103 as being obvious over Kawasaki in view of Arikado
and Suzuki, and claims 43 and 44 are correspondingly rejected
as being obvious over these references and further in view of
Tazi.
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