Appeal No. 96-0096
Application No. 08/094,794
The subject matter on appeal relates to a process for
depositing a borophosphosilicate glass on a substrate which
comprises mixing tetramethylcyclotetrasiloxane and trimethyl-
borate together to form a first gaseous mixture, mixing
trimethylphosphite and oxygen together to form a second
gaseous mixture and heating the second gaseous mixture, and
introducing the first and second gaseous mixtures into the
reactor at different locations remote from the substrate.
This appealed subject matter is adequately illustrated by
independent claim 6 which reads as follows:
6. A process for depositing a borophosphosilicate glass
on a substrate, comprising the steps of:
supplying an energized substrate;
supplying sources of the gases tetramethylcyclotetra-
siloxane, trimethylborate, trimethylphosphite, and oxygen;
mixing the tetramethylcyclotetrasiloxane and trimethyl-
borate together to form a first gaseous mixture;
mixing the trimethylphosphite and the oxygen together to
form a second gaseous mixture and heating the second gaseous
mixture;
introducing the first gaseous mixture into the reactor
and the second gaseous mixture into the reactor at different
locations remote from the substrate; and
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