Appeal No. 96-0096
Application No. 08/094,794
causing the first gaseous mixture and the second gaseous
mixture to mix together and to flow past the energized
substrate.
The reference relied upon by the examiner as evidence of
obviousness is:
Lagendijk 5,028,566 Jul.
2, 1991
All of the claims on appeal stand rejected under 35
U.S.C.
§ 103 as being unpatentable over Lagendijk. In the paragraph
bridging pages 4 and 5 of the Answer, the examiner expressed
his basic obviousness position as follows:
With respect to claims 1 and 6, Lagendijk
teaches mixing TMCTS and oxygen, upon entry into the
furnace, to produce an SiO film. Lagendijk fails to
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recite the sequence of mixing the four constituents
(TMCTS, TMPI, TMB and O) for the deposition of a
borophosphosilicate film or that the mixtures are
divided into two separate mixes and that the second
mixture is supplied between the first mixture and
the substrate. Lagendijk is silent on how the
constituents of the doped SiO film are mixed. It is
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the examiner's position that Lagendijk's disclosure
is generic to all sequences of feeding in the
reactive gases and includes mixing the silane and
boron sources together in one location, mixing the
phosphorous and oxygen in another distinct location
and causing the mixtures to form one mixture which
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