Appeal No. 95-4115 Page 5 Application No. 07/932,714 reticle using a silicon dioxide phase shifter made with a transparent film of a material such as silicon dioxide applied via a sputtering technique or the like onto a substrate (column 7, lines 30-37, and column 19, lines 59-64). In one of the separate rejections, the examiner relies on Morrison and in the other on JP-1236544 as admitted by appellant on pages 6 and 7 of the specification each for teaching liquid phase3 epitaxial growth to "selectively form silicon dioxide." We agree with appellant that Morrison describes a liquid phase epitaxial growth process as an optional method for forming a silicon layer of a semiconductor (brief, pages 9 and 10 and reply brief, pages 2 and 3), not a silicon dioxide layer over exposed portions of a chemically vapor deposited thin film of silicon dioxide. Thus, from our perspective, it is not clear how the combined teachings of Okamoto and 3We note that JP-1236544 is not listed on a Notice of References Cited by Examiner (PTO-892), a Notice of Art Cited by Applicant (PTO-1449) that was acknowledged by the examiner, or listed separately in the examiner's answer as new prior art (answer, page 2). In view of the above and the examiner's reference to the specification at pages 6 and 7 for an admission by appellant regarding JP-1236544 (answer, page 3), our consideration of the new ground of rejection set forth at pages 3 and 4 of the answer is based on appellant's admissions in the carryover paragraph at pages 6 and 7 of the specification as the applied secondary reference teaching.Page: Previous 1 2 3 4 5 6 7 8 9 NextLast modified: November 3, 2007