Ex parte YAMANAKA - Page 5




                 Appeal No. 95-4115                                                                                       Page 5                        
                 Application No. 07/932,714                                                                                                             
                 reticle using a silicon dioxide phase shifter made with a                                                                              
                 transparent film of a material such as silicon dioxide applied                                                                         
                 via a sputtering technique or the like onto a substrate                                                                                
                 (column 7, lines 30-37, and column 19, lines 59-64). In one of                                                                         
                 the separate rejections, the examiner relies on Morrison and                                                                           
                 in the other on JP-1236544 as admitted by appellant on pages 6                                                                         
                 and 7 of the specification  each for teaching liquid phase3                                                                                       
                 epitaxial growth to "selectively form silicon dioxide."                                                                                
                          We agree with appellant that Morrison describes a liquid                                                                      
                 phase epitaxial growth process as an optional method for                                                                               
                 forming a silicon layer of a semiconductor (brief, pages 9 and                                                                         
                 10 and reply brief, pages 2 and 3), not a silicon dioxide                                                                              
                 layer over exposed portions of a chemically vapor deposited                                                                            
                 thin film of silicon dioxide. Thus, from our perspective, it                                                                           
                 is not clear how the combined teachings of Okamoto and                                                                                 


                          3We note that JP-1236544 is not listed on a Notice of                                                                         
                 References Cited by Examiner (PTO-892), a Notice of Art Cited                                                                          
                 by Applicant (PTO-1449) that was acknowledged by the examiner,                                                                         
                 or listed separately in the examiner's answer as new prior art                                                                         
                 (answer, page 2). In view of the above and the examiner's                                                                              
                 reference to the specification at pages 6 and 7 for an                                                                                 
                 admission by appellant regarding JP-1236544 (answer, page 3),                                                                          
                 our consideration of the new ground of rejection set forth at                                                                          
                 pages 3 and 4 of the answer is based on appellant's admissions                                                                         
                 in the carryover paragraph at pages 6 and 7 of the                                                                                     
                 specification as the applied secondary reference teaching.                                                                             







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