Ex parte WILLER et al. - Page 3




           Appeal No. 1996-0189                                                               
           Application No. 08/054,200                                                         


                Appealed claims 1-9 stand rejected under 35 U.S.C. § 103                      
           as being unpatentable over either Wang or Lamont in view of                        
           either Armstrong or Ajika.  Claims 10-14 and 17-21 stand                           
           rejected under 35 U.S.C. § 103 as being unpatentable over Wang                     
           or Lamont in view of Foell.  In addition, claims 15, 16, 22                        
           and 23 stand rejected under 35 U.S.C. § 103 as being                               
           unpatentable over either Wang or Lamont in view of Foell and                       
           further in view of Ajika or Armstrong.                                             
                We have carefully considered the respective positions                         
           advanced by appellants and the examiner.  In so doing, we                          
           agree with appellants that the prior art applied by the                            
           examiner fails to establish a prima facie case of obviousness                      
           for the claimed subject matter.  Accordingly, we will not                          
           sustain the examiner's rejections.                                                 
                While Wang and Lamont, the primary references, disclose                       
           methods for producing a planar aluminum-containing layer on a                      
           substrate having hole structures by sputtering processes, the                      
           examiner recognizes that the methods of the references do not                      
           close the hole structures without filling a lower region of                        
           the structures, as required by the appealed claims.  Indeed,                       
           as emphasized by appellants, it is the objective of the                            

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