Appeal No. 1996-0189 Application No. 08/054,200 containing layer having a planar surface which closes the hole structures without filling their lower regions. In the absence of such teaching or sugges-tion in the applied prior art and a total lack of motivation for one of ordinary skill in the art to perform the claimed process in view of the teachings of the prior art, we find that the examiner's rejections lack the requisite factual basis for supporting a conclusion of obviousness. In re Warner, 379 F.2d 1011, 1017, 154 USPQ 173, 177-78 (CCPA 1967). At best, the prior art of record, including appellants' acknowledged state of the art, might make it obvious to try to close, without filling, the hole structures of a substrate by sputtering an aluminum- containing layer which has a planar surface. Manifestly, obvious to try is not a proper standard for establishing obviousness under 35 U.S.C. § 103. In conclusion, based on the foregoing, we are constrained to reverse the examiner's rejections. REVERSED EDWARD C. KIMLIN ) Administrative Patent Judge ) ) -5-Page: Previous 1 2 3 4 5 6 7 NextLast modified: November 3, 2007