Appeal No. 96-1583 Application 08/066,618 active base regions 64", it is clear from the context of the referenced disclosure that the lower energy implantation is not used to form the active base region 64. In the paragraph bridging columns 14 and 15 of Zdebel, the reference teaches that, preferably, less than ten percent of the low energy implantation penetrates into the epitaxial silicon region 68. As described at column 15, lines 11 et seq. "[t]he purpose of the shallow oxide implant is to completely saturate that portion of oxide 110 near silicon-oxide interface 68B with boron so that out- diffusion of boron from region 68 into oxide 110 across interface 68B is inhibited, so that the deep boron implant remains in silicon region 68 and accurately determines the doping and Gummel number of base 64." Manifestly, the predominant portion of the low energy implantation is located in screen oxide 11 at or near interface or surface 68B between oxide 110 and layer 68 (column 14, lines 10-13). It is the deeper, high energy implantation of Zdebel that "substantially determines the Gummel number in base 64" (column 14, line 17), 4Page: Previous 1 2 3 4 5 6 7 NextLast modified: November 3, 2007