Appeal No. 96-2105
Application 08/059,861
This is an appeal from the examiner’s final rejection of
claims 1-17, which are all of the claims in the application.
THE INVENTION
Appellants’ claimed invention is directed toward a
process for forming a photoresist composition by
stoichiometric carbonation of a polymer having hydroxyaromatic
groups. The carbonation is carried out using a dialkyl
dicarbonate in the presence of an unhindered tertiary amine
catalyst selected from a recited group, and the reaction
mixture does not contain more than 0.02 equivalents of an
organic amine base per equivalent of dialkyl dicarbonate.
Claim 1 is illustrative and reads as follows:
1. A process for the stoichiometric carbonation of a
microlithographically useful polymer comprising
hydroxyaromatic groups comprising the steps of
(a) mixing together in a reaction vessel
(1) a hydroxyaromatic material,
(2) a stoichiometric amount of a dialkyl dicarbonate to
give the desired degree of substitution,
(3) a catalytic amount of an unhindered tertiary amine,
wherein the amine is selected from the group consisting of
-2-2
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Last modified: November 3, 2007