Appeal No. 96-2261
Application 08/026,669
Tomisawa et al. (Tomisawa) 4,517,282 May 14, 1985
Cherry et al. (Cherry) 4,832,753 May 23, 1989
L. Solymar and D. Walsh (Solymar), Lectures on the Electrical
Properties of Materials 248-51 (Oxford University Press 1990).
THE REJECTIONS
The claims stand rejected under 35 U.S.C. § 103 as
follows: claims 17-21, 23, 25-27, 29, 30 and 32 over Bardina
in view of Solymar; claims 22 and 31 over Bardina in view of
Solymar and Cherry; and claims 24 and 28 over Bardina and
Solymar in view of Tomisawa.
OPINION
We have carefully considered all of the arguments
advanced by appellant and the examiner and agree with
appellant that the aforementioned rejections are not well
founded. Accordingly, we do not sustain these rejections.
We need to discuss only appellant’s broadest claim, which
is claim 32.
Bardina discloses an automated method for decontaminating
semiconductor wafer handling equipment wherein the equipment
is sprayed with a mixture of detergent and deionized water and
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