Ex parte MUKA - Page 2




          Appeal No. 1999-2220                                       Page 2           
          Application No. 08/662,930                                                  


               The appellant's invention is directed to a substrate                   
          processing apparatus.  The claims on appeal have been                       
          reproduced in an appendix to the Brief.                                     


                                    THE REFERENCE                                     
               The reference relied upon by the examiner to support the               
          final rejection is:                                                         
          Iwai et al. (Iwai)            5,562,383                Oct.  8,             
          1996                                                                        
          (filed Jan. 5, 1996)                                                        

                                    THE REJECTIONS                                    
               Claims 1-7, 29-35, 51-55, 58, 60, 63-66, 69, 71 and 79                 
          stand rejected under 35 U.S.C. § 102(e) as being anticipated by             
          Iwai.                                                                       
               Claims 1-7, 29-36, 51-55, 58-66, 69-71 and 79 stand                    
          rejected under 35 U.S.C. § 103 as being unpatentable over Iwai.             


                                       OPINION                                        
               Rather than attempt to reiterate the examiner’s full                   
          commentary with regard to the above-noted rejections and the                
          conflicting viewpoints advanced by the examiner and the                     








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