Appeal No. 1996-2284
Application No. 08/228,889
58-63). As a result, the examiner is incorrect to state that
"Kosugi doesn't teach using two mirrors with detectors" (Final
Rejection at page 3) and to therefore rely on Sakamoto as
teaching this feature (Final Rejection at pages 3-4). 9
Appellants' argument (Brief at page 5) that Kosugi does
not correct alignment errors resulting from environmental
effects on the lens is unpersuasive. The types of alignment
errors corrected by Kosugi's system include "[a]n error with
respect to the displacement caused by any change in
temperature of the components, vibration or the like during
the time period from the alignment to the exposure" (col. 2,
lines 4-7). Appellants have not explained why Kosugi's system
will not correct errors resulting from a change in the
temperature of the lens while the system is correcting
misalignment errors between the reticle and the wafer.
Appellants' narrow interpretation of "secured to said
lens," recited in claim 1, is unconvincing for the reasons
given above in the discussion of Mitome.
Appellants also argue that Kosugi's detector is not in
9As Sakamoto is not relied on for any other teaching, it
will be given no further consideration.
13
Page: Previous 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Next
Last modified: November 3, 2007