Appeal No. 1996-2284
Application No. 08/228,889
the image plane of the lens used for projecting images from
the object plane to the image plane of the lithography system
(Brief at page 5), as required by claims 1 and 5. The
examiner has not addressed this argument, which we find
persuasive. Detector 29 is not located in a part of the image
plane of lens 5, which contains only wafer 4. Instead, the
detector 29 is located in a different image plane which is
optically coupled to the image plane of lens 5 (which contains
only wafer 4) by mirror 27, objective lens 26, prism 25, and
relay lens 28. Consequently, we are reversing the rejection
of claims 1 and 5 based on Kosugi in view of Sakamoto as well
as the 103 rejection of dependent claims 2-4 over those
references.
Summary
The rejection based on Mitome is affirmed as to claims 1
and 5 and reversed as to claims 2-4. The rejection based on
Kosugi in view of Sakamoto is reversed as to claims 1-5.
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