Appeal No. 1996-3626
Application 08/302,155
the previously non-elected invention, have been canceled and
form no issue in this appeal.
THE INVENTION
The appealed subject matter is directed to a method for
improving the efficiency of various processes which introduce
and distribute reactant gases. Such processes include
cleaning and etching surfaces, materials synthesis, such as
chemical vapor deposition (CVD) and flame synthesis of diamond
films. The process utilizes constrained stagnation flow
geometry, including so-called axisymmetric flow, to achieve an
efficient process. According to appellants, they discovered
that by surrounding the inner flow of reactant gas with either
an outer flow of gas (coflow, see Fig. 3) or with a mechanical
means (trumpet bell, see Fig. 4) ideal stagnation flow
properties of the reactant gases are obtained yielding
processes highly efficient in the use of reactants.
Claims 1, 2 and 8 are believed to be adequately
representative of the appealed subject matter and are
reproduced below for a more facile understanding of
2
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