Appeal No. 1997-3731
Application No. 08/152,089
which appears in “APPENDIX 1" to the main brief (Paper No.
30).
As evidence of obviousness, the examiner has applied the
documents listed below:
Levinstein et al. 4,419,201 Dec. 6,
1983
(Levinstein ‘201)
Laporte et al. 4,491,496 Jan.
1, 1985
(Laporte)
Japanese Patent
Soumai et al. 59-040534 Mar. 6,
1984
(Japanese)1
Bennett et al. (Bennett), “SELECTIVE AND DIRECTIONAL ETCHING
OF POLYSILICON AND WSi ,” IBM Technical Disclosure Bulletin,
2
Vol. 25, No. 1, pp 33-34 (1982).
Roland et al. (Roland), “Endpoint detection in plasma
etching”, Journal of Vacuum Science & Technology/A, Vol. 3,
No. 3, pp
631-36 (1985).
1Our understanding of this document is derived from a
reading of a translation thereof prepared in the United States
Patent and Trademark Office. A copy of the translation is
appended to this opinion.
2
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