Appeal No. 1997-4050 Application 08/535,317 Appellants’ Invention Figure 1 shows a transducer 10, useful as an accelerometer and the like, which includes a top platen 20 having cover 22 and a conductive surface 24 and a bottom platen 30 consisting of a cover 32, a conductive surface 34, and an insulating layer 35. A movable member 40 covered by underlying and overlying conductive layers 42 is supported on an elastically deformable spring structure 50. The spring structure is connected to the covers 22 and 32. A feedback position controller circuit 60 controls the voltage applied to the top cover conductive surface 24 so as to hold the movable member 40 at a selected equilibrium height between the top and bottom platens 20,30. Circuit 60 senses changes in capacitance between the conductive surfaces 24, 42 on the top platen 20 and movable member 40 to determine displacement of the movable member from its equilibrium height. It then changes the voltage applied to the cover conductive surface 24 so as to exert a compensating force tending to return the movable member 40 to its equilibrium height. For a caging function, battery 100 is connected directly to 3Page: Previous 1 2 3 4 5 6 7 8 9 10 11 12 NextLast modified: November 3, 2007