Appeal No. 1998-0178
Application No. 08/254,854
remains as elemental titanium even after the titanium
reactions occur. Although the via itself (the opening) may
not have elemental titanium in Fujii, the “via structure”
includes the sidewalls which form the opening, including the
sidewall formed by layer 101. Thus, the via structure of
Fujii does include a layer of elemental titanium 101 as shown
in the drawings. Since claim 24 forbids such a layer of
elemental titanium, claim 24 is not anticipated by the
disclosure of Fujii. Therefore, we do not sustain the
rejection of claim 24 as anticipated by Fujii. Since claims
26-30 all depend from claim 24, we also do not sustain the
rejection of these claims as anticipated by Fujii.
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