The opinion in support of the decision being entered today was not
written for publication and is not binding precedent of the Board.
Paper No. 21
UNITED STATES PATENT AND TRADEMARK OFFICE
_____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
_____________
Ex parte ZORAN KRIVOKAPIC
_____________
Appeal No. 1998-2649
Application No. 08/616,990
______________
ON BRIEF
_______________
Before KIMLIN, GARRIS, and PAWLIKOWSKI, Administrative Patent
Judges.
GARRIS, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on an appeal from the final rejection
of claims 1-29, which are all of the claims in the
application.
The subject matter on appeal relates to a plasma
sputtering apparatus and method which includes a first and
second wafer support located at the lower and upper ends
respectively of a chamber, a coil of conductive material
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