The opinion in support of the decision being entered today was
not written for publication and is not binding precedent of
the Board.
Paper No. 39
UNITED STATES PATENT AND TRADEMARK OFFICE
__________________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
_______________
Ex parte JUNICHI SATO
_______________
Appeal No. 1998-2669
Application 08/283,253
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HEARD: April 24, 2001
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This is a decision on an appeal from the final
rejection of claims 8-11, 13-15, and 17-28, which are all of
the claims remaining in the application.
The subject matter on appeal relates to a method of
manufacturing a semiconductor device which includes the steps
of forming a first film of pure metal by chemical vapor
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