Appeal No. 1998-1216
Application 08/356,194
The prior art set forth below is relied upon by the
examiner as evidence of obviousness:
Sarin 4,943,450 July 24, 1990
Kawakami 5,099,790 Mar. 31, 1992
Sandhu et al. (Sandhu) 5,173,327 Dec. 22, 1992
Hirose et al. (Hirose) 5,203,959 Apr. 20, 1993
Asahina 5,342,806 Aug. 30, 1994
Kumar et al. (Kumar), "Growth and Properties of TiN and TiO N
x y
Diffusion Barriers in Silicon on Sapphire Integrated
Circuits," Thin Solid Films, 287-301 (1987).
The admitted prior art described by the appellant on pages 1-3
of the subject specification.
The following rejections under 35 U.S.C. § 103 are
before us on this appeal:
Claims 8, 9, 13, 14, 17-19, 21, 23, and 24 stand
rejected over the admitted prior art in view of Kumar or
Asahina and further in view of Hirose.
Claims 11 and 15 stand rejected over the admitted
prior art in view of Kumar and further in view of Hirose and
further in view of Sandhu.
Claim 10 stands rejected over the admitted prior art
in view of Kumar and further in view of Hirose and further in
view of Sarin.
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