Appeal No. 1998-2951
Application No. 08/675,692
a first layer formed on said primary surface of said
substrate and comprising TiN; and
a second layer formed on said first layer, said second
layer comprising tungsten having a plurality of recessed portions and
a plurality of elevated portions adjacent said recessed portions,
wherein said second layer covers an entire exposed surface of said
first layer.
The prior art references of record relied upon by the examiner
in rejecting the appealed claims are:
Gonzalez et al. (Gonzalez) 5,262,662 Nov. 16, 1993
Kashihara et al. (Kashihara) 5,382,817 Jan. 17, 1995
Tanaka et al. (Tanaka) JP 6-132493 May 13, 1994
(Japanese Kokai Patent Publication)
Claims 28, 29, and 31 through 38 stand rejected under 35 U.S.C.
§ 103 as being unpatentable over Gonzalez in view of Tanaka and
Kashihara.
Reference is made to the Examiner's Answer (Paper No. 14,
mailed November 28, 1997) for the examiner's complete reasoning in
support of the rejection, and to appellants' Brief (Paper
No. 13, filed November 12, 1997) and Reply Brief (Paper No. 15, filed
January 27, 1998) for appellants' arguments thereagainst.
OPINION
We have carefully considered the claims, the applied prior art
references, and the respective positions articulated by appellants
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