Appeal No. 1998-2951 Application No. 08/675,692 polysilicon) increases the capacitance. However, we disagree that Tanaka suggests roughening the tungsten layer of Gonzalez. The tungsten of Gonzalez is covered with a layer of polysilicon, thereby making polysilicon the top surface of the bottom electrode. Thus, the skilled artisan would have applied 5Page: Previous 1 2 3 4 5 6 7 8 NextLast modified: November 3, 2007