Appeal No. 1999-2119
Application No. 08/815,410
three components, (a) a poly(hydroxystyrene) resin, (b) a
dissolution inhibitor and (c) an onium salt of the formula
(R) S M wherein only one or two of the R’s is a t-alkoxy3 +
substituted phenyl group. Further details of this appealed
subject matter are set forth in representative independent claim
6 which reads as follows:
6. An aqueous alkali-developable positive resist material
consisting essentially of three components, (a) a
poly(hydroxystryene) resin in which hydrogen atoms of the hydroxy
groups are partly replaced by t-butoxycarbonyl groups, (b) a
dissolution inhibitor and (c) an onium salt, wherein the three
components (a), (b) and (c) have the weight proportions defined
by the relations: 0.55 < a, 0.07 < b < 0.40, 0.005 < c < 0.15,
and a + b + c = 1; said onium salt being selected from the onium
salts of the formula (R) S M, wherein the three R’s are the same3 +
or different, each being an aryl group, provided that only one or
two of the R’s is a t-alkoxy substituted phenyl group, and M is a
trifluoromethane sulfonate or paratoluenesulfonate anion.
The references relied upon by the examiner as evidence of
obviousness are:
Nguyen-Kim et al. (Nguyen-Kim) 5,035,979 Jul. 30, 1991
Schwalm et al. (Schwalm ‘037) 5,220,037 Jun. 15, 1993
Murata et al. (Murata ‘695) 5,580,695 Dec. 3, 1996
(effective filing date Feb. 19, 1993)
Watanabe et al. (Watanabe ‘787) 5,624,787 Apr. 29, 1997
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