Appeal No. 2000-0160
Application 08/595,150
indefiniteness.) The etch stop cap layer 54 does not completely
cover the edge of this composite patterned metal layer because of
overetching, as shown in Appellant's figures 8 and 9 and
described in the specification, page 10, lines 10-13. Thus, to
the extent Appellant asserts that the limitation of "said
contiguous etch stop cap layer covering said electrically
conducting edge surfaces" in claim 19 means "completely covering
the edge surfaces," the limitation is misdescriptive of the
disclosed invention under § 112, second paragraph. In the
obviousness rejection, we have interpreted the limitation to
require only covering part of the edge to avoid an indefiniteness
problem and to be consistent with the disclosure. Claim 22,
which specifies the electrically conducting coating on metal
lines, does not clarify what part of the edge surface is covered
by the etch stop cap layer. Claim 24 recites "not entirely
removing said insulating ILD via etch stop cap layer covering
said edge surfaces of said electrically conducting lines," which
indicates that part of the edge surface may be exposed. Thus,
claims 24 and 34 are not rejected under this second ground.
Third, the limitation of "a second portion of said via
Page: Previous 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Next
Last modified: November 3, 2007