Ex Parte IKEDA - Page 9



          Appeal No. 2001-1512                                             9           
          Application No. 09/273,541                                                   

          or motivation in the reference to do so.”).  See also In re                  
          Fritch, 972 F.2d 1260, 1266 n.14, 23 USPQ2d 1780, 1783-84 n.14               
          (Fed. Cir. 1992), citing In re Gordon, 733 F.2d 900, 902, 221                
          USPQ 1125, 1127 (Fed. Cir. 1984) (“The mere fact that the prior              
          art may be modified in the manner suggested by the Examiner does             
          not make the modification obvious unless the prior art suggested             
          the desirability of the modification").                                      
               Moreover, to assert that the cooling gas flow rate                      
          inherently corresponds to the leakage rate at the wafer-chuck                
          interface when valve 17 is closed, places the initial burden on              
          the Examiner to establish that “the missing descriptive matter is            
          necessarily present in the thing described in the reference, and             
          that it would be so recognized by person of ordinary skill.”  In             
          re Robinson, 169 F.3d 743, 745, 49 USPQ2d 1949, 1950-1951 (Fed.              
          Cir. 1999), citing Continental Can Co. v. Monsanto Co., 948 F.2d             
          1264, 1269, 20 USPQ2d 1746, 1749 (Fed. Cir. 1991) (inherency may             
          not be established by probabilities or possibilities or by the               
          mere fact that a certain thing may result for a given set of                 
          circumstances).  In this case, we agree with Appellant that both             
          valves 16 and 17 are manipulated or continuously controlled                  
          (brief, page 14), since the Examiner provides no showing that                







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