The opinion in support of the decision being entered today was not
written for publication and is not binding precedent of the Board.
Paper No. 13
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte JUN-KAI PENG, WEI-KUN YEH
and CHIARN-LUNG LEE
____________
Appeal No. 2001-1700
Application No. 09/160,964
____________
ON BRIEF
____________
Before, OWENS, WALTZ and KRATZ, Administrative Patent Judges.
KRATZ, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on appeal from the examiner's final
rejection of claims 1-7, which are all of the claims pending
in this application.
BACKGROUND
Appellants' invention relates to a method for processing
a semiconductor wafer wherein an anisotropic etch forms a
groove in a device surface thereof. The groove has
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