Ex Parte NAGAHARA et al - Page 1



          The opinion in support of the decision being entered today was              
          not written for publication and is not binding precedent of the             
          Board.                                                                      
                                                            Paper No. 24              
                      UNITED STATES PATENT AND TRADEMARK OFFICE                       
                                     __________                                       
                         BEFORE THE BOARD OF PATENT APPEALS                           
                                  AND INTERFERENCES                                   
                                     __________                                       
                     Ex parte RONALD J. NAGAHARA and DAWN M. LEE                      
                                     __________                                       
                                Appeal No. 2001-2184                                  
                               Application 09/005,364                                 
                                     ___________                                      
                                      ON BRIEF                                        
                                     ___________                                      
          Before WARREN, OWENS and WALTZ, Administrative Patent Judges.               
          OWENS, Administrative Patent Judge.                                         

                                 DECISION ON APPEAL                                   
               This appeal is from the final rejection of claims 17, 19               
          and 21-23, which are all of the claims remaining in the                     
          application.                                                                
                                    THE INVENTION                                     
               The appellants’ claimed invention is directed toward a                 
          chemical mechanical polishing method for planarizing a surface of           








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